著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Symposium on Photomask Technology and Management and Brodsky, William L. and Shelden, Gilbert V. and BACUS (Technical group)","14th annual Symposium on Photomask Technology and Management : proceedings : 14-16 September 1994, Santa Clara, California",,SPIE,1994,Proceedings,,0819416533,,https://cir.nii.ac.jp/crid/1130000797002546432