著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Materials Research Society and Ayón, Arturo A. and Buchheit, Thomas E. and Kahn, Harold and Spearing, S. Mark","Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A.",,Materials Research Society,2002,Materials Research Society symposium proceedings,,1558996230,,https://cir.nii.ac.jp/crid/1130000797010887552