著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Monahan, Kevin M. and Society of Photo-optical Instrumentation Engineers","Integrated circuit metrology, inspection, and process control II : 29 February-1 March 1988, Santa Clara, California",,SPIE,1988,Proceedings,,0892529563,,https://cir.nii.ac.jp/crid/1130000797029850624