著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Society of Photo-optical Instrumentation Engineers and Houlihan, Francis M.","Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA",,SPIE,2000,Proceedings,,0819436178,,https://cir.nii.ac.jp/crid/1130000797044318848