著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Arnold, William H. and Society of Photo-optical Instrumentation Engineers","Integrated circuit metrology, inspection, and process control V : 4-5 March 1991, San Jose, California",,SPIE,1991,Proceedings,,0819405639,,https://cir.nii.ac.jp/crid/1130000797051573376