著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "International Symposium on Plasma Processing and Mathad, G. S. and Celler, George K. and Electrochemical Society. Dielectric Science and Technology and Electronocs Divisions",Plasma processing XIII : proceedings of the international symposium,,Electrochemical Society,2000,Proceedings,,1566772710,,https://cir.nii.ac.jp/crid/1130000797066445440