著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Santos, Héctor J. de los",Introduction to microelectromechanical (MEM) microwave systems,,Artech House,1999,The Artech House microwave library,,089006282X,,https://cir.nii.ac.jp/crid/1130000797074686976