著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Andricacos, P. C. and Electrochemical Society. Dielectric Science and Technology Division and Electrochemical Society. Electronics Division",Electrochemical processing in ULSI fabrication and semiconductor/metal deposition II : proceedings of the international symposium,,Electrochemical Society,1999,Proceedings,,1566772311,,https://cir.nii.ac.jp/crid/1130000797122406528