著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"International Symposium on Cleaning Technology in Semiconductor Device Manufacturing and Rużyłło, Jerzy and Electrochemical Society. Electronics Division",Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium,,Electrochemical Society,2002,Proceedings,,1566773598,,https://cir.nii.ac.jp/crid/1130000797151089152