著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "真壁, 利明 and Petrović, Z. (Zoran Lj)",Plasma electronics : applications in microelectronic device fabrication,,Taylor & Francis,2006,Series in plasma physics,,9780750309769,,https://cir.nii.ac.jp/crid/1130000797164610176