著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Buehler, Martin G.",Microelectronic test pattern NBS-3 for evaluating the resistivity-dopant density relationship of silicon,,U.S. G.P.O.,1976,NBS special publication,,,,https://cir.nii.ac.jp/crid/1130000797178176384