著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Soft-X-ray Projection Lithography Topical Meeting (1992 : Monterey, Calif.) and United States. Air Force. Office of Scientific Research and United States. Defense Advanced Research Projects Agency and National Science Foundation (U.S.)","Soft-x-ray projection lithography : summaries of papers presented at the Soft-X-ray Projection Lithography Topical Meeting, April 6-8, 1992, Monterey, California",Postconference ed,Optical Society of America,1992,Technical digest series,,1557522308,,https://cir.nii.ac.jp/crid/1130000797208751616