Soft-x-ray projection lithography : summaries of papers presented at the Soft-X-ray Projection Lithography Topical Meeting, April 6-8, 1992, Monterey, California

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Bibliographic Information

Title
"Soft-x-ray projection lithography : summaries of papers presented at the Soft-X-ray Projection Lithography Topical Meeting, April 6-8, 1992, Monterey, California"
Statement of Responsibility
sponsored by Air Force Office of Scientific Research, Defense Advanced Research Projects Agency, National Science Foundation for the Optical Society of America
Publisher
  • Optical Society of America
  • Postconference ed
Publication Year
  • c1992
Book size
28 cm

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Notes

Includes bibliographical references and index

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