著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Jaeger, Richard C.",Introduction to microelectronic fabrication,2nd ed,Prentice Hall,2002,Modular series on solid state devices,,0201444941,,https://cir.nii.ac.jp/crid/1130000797242762624