著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Babu, Suryadevara V. and Cadien, Kenneth C. and Yano, Hiroyuki","Chemical-mechanical polishing 2001 -- advances and future challenges : symposium held April 18-20, 2001, San Francisco, California, U.S.A.",,Materials Research Society,2001,Materials Research Society symposium proceedings,,1558996079,,https://cir.nii.ac.jp/crid/1130000797252745728