著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Materials Research Society and LaVan, David A. and Ayón, Arturo A. and Buchheit, Thomas, E. and Madou, Marc J.","Nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.",,Materials Research Society,2003,Materials Research Society symposium proceedings,,1558996788,,https://cir.nii.ac.jp/crid/1130000797257535104