著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "King, Tsu-Jae and Yu, Bin and Lander, Robert J. P. and Saito, Shuichi and Materials Research Society","CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A.",,Materials Research Society,2003,Materials Research Society symposium proceedings,,1558997024,,https://cir.nii.ac.jp/crid/1130000797264973696