著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Campbell, Stephen A.",The science and engineering of microelectronic fabrication,2nd ed,Oxford University Press,2001,The Oxford series in electrical and computer engineering,,0195136055,,https://cir.nii.ac.jp/crid/1130000797343190784