著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Dobisz, Elizabeth Ann and Society of Photo-optical Instrumentation Engineers and Semiconductor Equipment and Materials International and International SEMATECH","Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA",,SPIE,2001,Proceedings,,0819440299,,https://cir.nii.ac.jp/crid/1130000797374158336