著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Choudhary, Vikas and Iniewski, Krzysztof",MEMS : fundamental technology and applications,,CRC Press,2013,"Electronic devices, circuits, and systems",,9781466515819,,https://cir.nii.ac.jp/crid/1130000797393855360