著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Stover, Harry L. and Society of Photo-optical Instrumentation Engineers","Optical microlithography V : 13-14 March 1986, Santa Clara, California",,SPIE--the International Society for Optical Engineering,1986,Proceedings,,0892526688,,https://cir.nii.ac.jp/crid/1130000797395728000