著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Hinsberg, William D. and Society of Photo-optical Instrumentation Engineers","Advances in resist technology and processing X : 1-2 March 1993, San Jose, California",,SPIE,1993,Proceedings,,0819408271,,https://cir.nii.ac.jp/crid/1130000797492308352