著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Kley, Ernst-Bernhard and Herzig, Hands Peter","Lithographic and micromachining techniques for optical component fabrication II : 3-4 August 2003, San Diego, California, USA",,SPIE,2003,Proceedings,,0819450561,,https://cir.nii.ac.jp/crid/1130000797503276800