著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Akins, Vaughn E. and ハラダ, ヒロユキ and Electrochemical Society. Electronics Division and Electrochemical Society. Dielectric Science and Technology Division",Proceedings of the seventh symposium on automated integrated circuits manufacturing,,Electrochemical Society,1992,Proceedings,,1566770041,,https://cir.nii.ac.jp/crid/1130000797514850816