Author,Title,Edition,Publisher,Year,Series,Number,ISBN,ISSN,URL
"Cuomo, J. J. and Rossnagel, Stephen M. and Kaufman, Harold R.","Handbook of ion beam processing technology : principles, deposition, film modification, and synthesis",,Noyes Publications,1989,Materials science and process technology series,,081551199X,,https://cir.nii.ac.jp/crid/1130000797527465344