著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Burnett, David and Kimura, Shiníchiro and Singh, Bhanwar and Society of Photo-optical Instrumentation Engineers and Solid State Technology (Organization) and Electrochemical Society and American Vacuum Society","Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA",,SPIE,2000,Proceedings,,0819438421,,https://cir.nii.ac.jp/crid/1130000797542453632