著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Kissinger, Gudrun and Weiland, Larg H. and Society of Photo-optical Instrumentation Engineers and Scottish Enterprise and European Optical Society and Institution of Electrical Engineers","In-line characterization, yield, reliability, and failure analysis in microelectronic manufacturing II : 31 May-1 June 2001, Edinburgh, UK",,SPIE,2001,Proceedings,,0819441074,,https://cir.nii.ac.jp/crid/1130000797630554496