著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Gildenblat, Gennady Sh. and Schwartz, Gary P. and Society of Photo-optical Instrumentation Engineers","Metallization : performance and reliability issues for VLSI and ULSI : 12-13 September 1991, San Jose, California",,SPIE,1991,Proceedings,,0819407275,,https://cir.nii.ac.jp/crid/1130000797670445696