著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Coburn, J. W. and Gottscho, R. A. and Hess, Dennis W. and Materials Research Society and Symposium on Plasma Processing","Plasma processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.",,Materials Research Society,1986,Materials Research Society symposium proceedings,,0931837340,,https://cir.nii.ac.jp/crid/1130000797727285504