著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Pang, Stella W.","Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.",,Materials Research Society,1996,Materials Research Society symposium proceedings,,1558993096,,https://cir.nii.ac.jp/crid/1130000797730419584