著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Materials Research Society and Kumar, Ashok","Chemical-mechanical planarization - integration technology and realiability : symposium held March 28-31, 2005, San Francisco, California, U.S.A.",,Materials Research Society,2005,Materials Research Society symposium proceedings,,1558998209,,https://cir.nii.ac.jp/crid/1130000797786674304