著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Monahan, Kevin M. and University of Arizona. Optical Sciences Center and University of Rochester. Institute of Optics and Society of Photo-optical Instrumentation Engineers","Micron and submicron integrated circuit metrology : August 22-23, 1985, San Diego, California",,SPIE--International Society for Optical Engineering,1985,Proceedings,,0892526009,,https://cir.nii.ac.jp/crid/1130000797876059776