著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"International Symposium on Chemical Mechanical Planarization and Opila, Robert Leon and Electrochemical Society. Dielectric Science and Technology Division and Electrochemical Society. Meeting",Chemical Mechanical Planarization : proceedings of the International Symposium,,Electrochemical Society,2001,Proceedings,,"1566772931,1566773296,1566774047",,https://cir.nii.ac.jp/crid/1130000797882271616