Author,Title,Edition,Publisher,Year,Series,Number,ISBN,ISSN,URL
"International Vacuum Mechatronics Workshop and Belinski, Steven E.","Vacuum mechatronics : first international workshop, Santa Barbara, CA, 1989",,American Institute of Physics,1989,AIP conference proceedings,,0883183943,,https://cir.nii.ac.jp/crid/1130000797909098112