著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"International Symposium on Advanced Materials for ULSI and Scott, Martin (Martin P.) and 赤坂, 洋一 and Reif, Rafael and Electrochemical Society. Electronics Division and Electrochemical Society. Dielectrics and Insulation Division and Electrochemical Society. High Temperature Materials Division",Proceedings of the First International Symposium on Advanced Materials for ULSI,,Electrochemical Society,1988,Proceedings,,,,https://cir.nii.ac.jp/crid/1130000797931054208