著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"花泉, 修 and 海野, 雅史 and 三浦, 健太","Silicon science and advanced micro-device engineering II/ edited by Osamu Hanaizumi, Masafumi Unno and Kenta Miura",,Trans Tech Pub.,2011,Key engineering materials,,9783037852859,,https://cir.nii.ac.jp/crid/1130000797937659008