著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Middleman, Stanley and Hochberg, Arthur K.",Process engineering analysis in semiconductor device fabrication,,McGraw-Hill,1993,McGraw-Hill chemical engineering series,,0070418535,,https://cir.nii.ac.jp/crid/1130000797943504128