著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Pol, Victor and Society of Photo-optical Instrumentation Engineers","Optical/laser microlithography IV : 6-8 March 1991, San Jose, California",,SPIE,1991,Proceedings,,0819405620,,https://cir.nii.ac.jp/crid/1130000797949990400