著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Deligianni, H. and Electrochemical Society. Electrodeposition Division",Electrochemical processes in ULSI and MEMS : proceedings of the international symposium,,Electrochemical Society,2005,Proceedings,,1566774721,,https://cir.nii.ac.jp/crid/1130000797986628992