著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Crean, G. M. and Stuck, R. and Woollam, John A.","Semiconductor materials analysis and fabrication process control : proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5, 1992",,North-Holland,1993,European Materials Research Society symposia proceedings,,0444899081,,https://cir.nii.ac.jp/crid/1130000798022961152