著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"International Symposium on Chemical Mechanical Planarization and Electrochemical Society. Meeting and Opila, Robert Leon and Electrochemical Society. Electronics Division and Electrochemical Society. Dielectric Science and Technology Division",Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium,,Electrochemical Society,2000,Proceedings,,1566772605,,https://cir.nii.ac.jp/crid/1130000798057350400