著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Hodul, David","Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A.",,Materials Research Society,1989,Materials Research Society symposium proceedings,,1558990194,,https://cir.nii.ac.jp/crid/1130000798058534528