著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Einspruch, Norman G. and Cohen, Simon S. and Singh, Raj N.",Beam processing technologies,,Academic Press,1989,VLSI electronics : microstructure science,,012234121X,,https://cir.nii.ac.jp/crid/1130000798115656704