著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Schmidt, Dennis N. and Electrochemical Society. Electronics Division and Electrochemical Society. Dielectric Science and Technology Division",Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing I,,Electrochemical Society,1992,Proceedings,,156677022X,,https://cir.nii.ac.jp/crid/1130000798131363840