著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Dunham, Scott T. and Nelson, Jeffrey Steven","Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A.",,Materials Research Society,1998,Materials Research Society symposium proceedings,,1558993959,,https://cir.nii.ac.jp/crid/1130000798186171136