著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Postek, Michael T. and Society of Photo-optical Instrumentation Engineers and SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control","Integrated circuit metrology, inspection, and process control VI : 9-11 March 1992, San Jose, California",,SPIE,1992,Proceedings,,081940828X,,https://cir.nii.ac.jp/crid/1130000798187414272