著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Einspruch, Norman G. and Brown, Dale M.",Plasma processing for VLSI,,Academic Press,1984,VLSI electronics : microstructure science,,0122341082,,https://cir.nii.ac.jp/crid/1130000798194776960