著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Singh, Rajiv K","Chemical mechanical polishing 2000 -- fundamentals and materials issues : symposium held April 26-27, 2000, San Francisco, California, U.S.A.",,Materials Research Society,2001,Materials Research Society symposium proceedings,,1558995218,,https://cir.nii.ac.jp/crid/1130000798201428480