著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Oehrlein, G.S","Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A.",,Materials Research Society,2001,Materials Research Society symposium proceedings,,155899520X,,https://cir.nii.ac.jp/crid/1130000798212738688