著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Helbert, John N.","Handbook of VLSI microlithography : principles, technology, and applications",2nd ed,Noyes Publications/William Andrew Pub.,2001,Materials science and process technology series,,0815514441,,https://cir.nii.ac.jp/crid/1130000798223640960